RTEC / Rudolph Technologies, Inc. - SEC फाइलिंग, वार्षिक रिपोर्ट, प्रॉक्सी स्टेटमेंट

रूडोल्फ टेक्नोलॉजीज, इंक.
US ˙ NYSE ˙ US7812701032
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CIK 1094392
SEC Filings
All companies that sell securities in the United States must register with the Securities and Exchange Commission (SEC) and file reports on a regular basis. These reports include company annual reports (10K, 10Q), news updates (8K), investor presentations (found in 8Ks), insider trades (form 4), ownership reports (13D, and 13G), and reports related to the specific securities sold, such as registration statements and prospectus. This page shows recent SEC filings related to Rudolph Technologies, Inc.
SEC Filings (Chronological Order)
यह पृष्ठ SEC फाइलिंग की एक पूरी, कालानुक्रमिक सूची प्रदान करता है, ओनरशिप फाइलिंग को छोड़कर, जो हम अन्यत्र प्रदान करते हैं।
November 8, 2019 15-12B

RTEC / Rudolph Technologies, Inc. 15-12B - - 15-12B

15-12B UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 15 CERTIFICATION AND NOTICE OF TERMINATION OF REGISTRATION UNDER SECTION 12(g) OF THE SECURITIES EXCHANGE ACT OF 1934 OR SUSPENSION OF DUTY TO FILE REPORTS UNDER SECTIONS 13 AND 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934. Commission File Number: 001-36226 RUDOLPH TECHNOLOGIES, INC. (Exact name of registrant as sp

November 7, 2019 10-Q

Quarterly Report - 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended September 30, 2019 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 0

October 29, 2019 POS AM

RTEC / Rudolph Technologies, Inc. POS AM - - POS AM

POS AM 1 d825881dposam.htm POS AM As filed with the Securities and Exchange Commission on October 29, 2019 Registration No. 333-149704 Registration No. 333-54860 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 POST-EFFECTIVE AMENDMENT NO. 1 to Form S-3 Registration Statement No. 333-149704 Form S-3 Registration Statement No. 333-54860 Under The Securities Act of 1933 RUDOLP

October 29, 2019 POS AM

RTEC / Rudolph Technologies, Inc. POS AM - - POS AM

POS AM As filed with the Securities and Exchange Commission on October 29, 2019 Registration No.

October 29, 2019 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS - - FORM S-8 POS

FORM S-8 POS As filed with the Securities and Exchange Commission on October 29, 2019 Registration No.

October 29, 2019 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS - - S-8 POS

S-8 POS As filed with the Securities and Exchange Commission on October 29, 2019 Registration No.

October 29, 2019 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS - - S-8 POS

S-8 POS As filed with the Securities and Exchange Commission on October 29, 2019 Registration No.

October 28, 2019 EX-99.25

EX-99.25

NOTIFICATION OF THE REMOVAL FROM LISTING AND REGISTRATION OF THE STATED SECURITIES The New York Stock Exchange hereby notifies the SEC of its intention to remove the entire class of the stated securities from listing and registration on the Exchange at the opening of business on November 08, 2019, pursuant to the provisions of Rule 12d2-2 (a).

October 28, 2019 EX-3.1

Amended and Restated Certificate of Incorporation of Rudolph Technologies, Inc., dated October 25, 2019.

EX-3.1 Exhibit 3.1 AMENDED AND RESTATED CERTIFICATE OF INCORPORATION OF RUDOLPH TECHNOLOGIES, INC. FIRST: The name of the Corporation is: Rudolph Technologies, Inc. SECOND: The address of the Corporation’s registered office in the State of Delaware is Corporation Trust Center, 1209 Orange Street, in the City of Wilmington, County of New Castle, Delaware 19801. The name of its registered agent at t

October 28, 2019 8-K

Changes in Control of Registrant, Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year, Material Modification to Rights of Security Holders, Notice of Delisting or Failure to Satisfy a Continued Listing Rule or Standard; Transfer of Listing, Financial Statements and Exhibits, Completion of Acquisition or Disposition of Assets

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 25, 2019 Rudolph Technologies, Inc. (Exact name of Registrant as Specified in Its Charter) Delaware 001-36226 22-3531208 (State or Other Jurisdiction of Incorporation) (Commis

October 28, 2019 EX-3.2

Amended and Restated Bylaws of Rudolph Technologies, Inc., dated October 25, 2019.

EX-3.2 Exhibit 3.2 BYLAWS OF RUDOLPH TECHNOLOGIES, INC. (a Delaware corporation) TABLE OF CONTENTS Page ARTICLE I STOCKHOLDERS 1 1.1 Place of Meetings 1 1.2 Annual Meeting 1 1.3 Special Meetings 1 1.4 Notice of Meetings 1 1.5 Voting List 1 1.6 Quorum 2 1.7 Adjournments 2 1.8 Voting and Proxies 2 1.9 Action at Meeting 3 1.10 Conduct of Meetings 3 1.11 Action without Meeting 4 ARTICLE II DIRECTORS 5

October 25, 2019 8-K

Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 24, 2019 Rudolph Technologies, Inc. (Exact name of Registrant as Specified in Its Charter) Delaware 001-36226 22-3531208 (State or Other Jurisdiction of Incorporation) (Commis

October 15, 2019 425

NANO / Nanometrics, Inc. 425 - Merger Prospectus - 425

425 Filed by Nanometrics Incorporated Pursuant to Rule 425 under the Securities Act of 1933, as amended and deemed filed pursuant to Rule 14a-6(b) under the Securities Exchange Act of 1934, as amended Subject Company: Rudolph Technologies, Inc.

October 15, 2019 425

RTEC / Rudolph Technologies, Inc. 425 - Merger Prospectus - 425

425 1 d712343d425.htm 425 Filed by Rudolph Technologies, Inc. Pursuant to Rule 425 under the Securities Act of 1933, as amended and deemed filed pursuant to Rule 14a-6(b) under the Securities Exchange Act of 1934, as amended Subject Company: Rudolph Technologies, Inc. (Commission File No. 001-36226) Combination of Nanometrics and Rudolph Technologies to Create Onto Innovation MILPITAS, Calif. and

October 15, 2019 425

NANO / Nanometrics, Inc. 425 - Merger Prospectus - 425

425 Filed by Nanometrics Incorporated Pursuant to Rule 425 under the Securities Act of 1933, as amended and deemed filed pursuant to Rule 14a-6(b) under the Securities Exchange Act of 1934, as amended Subject Company: Rudolph Technologies, Inc.

October 15, 2019 425

RTEC / Rudolph Technologies, Inc. 425 - Merger Prospectus - 425

425 Filed by Rudolph Technologies, Inc. Pursuant to Rule 425 under the Securities Act of 1933, as amended and deemed filed pursuant to Rule 14a-6(b) under the Securities Exchange Act of 1934, as amended Subject Company: Rudolph Technologies, Inc. (Commission File No. 001-36226) News Nanometrics and Rudolph Technologies Jointly Announce Combined Company is Expected to Hold 2019 Third Quarter Financ

October 11, 2019 425

NANO / Nanometrics, Inc. 425 - Merger Prospectus - 425

425 1 d818731d425.htm 425 UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 11, 2019 nanometrics (Exact name of registrant as specified in its charter) Delaware 000-13470 94-2276314 (State or other jurisdiction of incorporati

October 11, 2019 425

RTEC / Rudolph Technologies, Inc. 425 - Merger Prospectus - 425

425 UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 11, 2019 Rudolph Technologies, Inc. (Exact name of Registrant as Specified in Its Charter) Delaware 001-36226 22-3531208 (State or Other Jurisdiction of Incorporation) (Co

October 11, 2019 8-K

Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 11, 2019 Rudolph Technologies, Inc. (Exact name of Registrant as Specified in Its Charter) Delaware 001-36226 22-3531208 (State or Other Jurisdiction of Incorporation) (Commis

September 10, 2019 DEFM14A

RTEC / Rudolph Technologies, Inc. DEFM14A - - DEFM14A

DEFM14A 1 d802818ddefm14a.htm DEFM14A Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 (Amendment No. ) Filed by the Registrant ☒ Filed by a party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Co

July 30, 2019 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2019 SECOND QUARTER EARNINGS

EX-99.1 2 rtec-ex9916.htm EX-99.1 - PRESS RELEASE EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2019 SECOND QUARTER EARNINGS New Dragonfly™ G2 system sales supported second quarter revenue growth WILMINGTON, MASSACHUSETTS (July 30, 2019) – Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of semiconductor process control systems and lithography equipment, as well as process control and yield

July 30, 2019 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 30, 2019 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commissio

July 30, 2019 10-Q

Quarterly Report - 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended June 30, 2019 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 001-36

June 27, 2019 425

RTEC / Rudolph Technologies, Inc. 425 - Merger Prospectus - 425

425 Filed by Rudolph Technologies, Inc. Pursuant to Rule 425 under the Securities Act of 1933, as amended and deemed filed pursuant to Rule 14a-12 under the Securities Exchange Act of 1934, as amended Subject Company: Rudolph Technologies, Inc. (Commission File No. 001-36226) The following joint press release regarding the 11th Annual CEO Summit was issued by Nanometrics Incorporated and Rudolph T

June 27, 2019 425

NANO / Nanometrics, Inc. 425 - Merger Prospectus - 425

425 Filed by Nanometrics Incorporated Pursuant to Rule 425 under the Securities Act of 1933, as amended and deemed filed pursuant to Rule 14a-12 under the Securities Exchange Act of 1934, as amended Subject Company: Rudolph Technologies, Inc.

June 24, 2019 8-K

Financial Statements and Exhibits, Other Events

8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): June 24, 2019 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commi

June 24, 2019 EX-99.1

NANOMETRICS – RUDOLPH TECHNOLOGIES MERGER CALL Moderator: Steve Roth June 24, 2019 8:30 a.m. ET

EX-99.1 2 d768479dex991.htm EX-99.1 Exhibit 99.1 NANOMETRICS – RUDOLPH TECHNOLOGIES MERGER CALL Moderator: Steve Roth 06-24-19/8:30 a.m. ET Confirmation # 7362935 NANOMETRICS – RUDOLPH TECHNOLOGIES MERGER CALL Moderator: Steve Roth June 24, 2019 8:30 a.m. ET OPERATOR: This is Conference #: 7362935 Operator: Ladies and gentlemen, thank you for standing by. Welcome to today’s conference call to disc

June 24, 2019 425

RTEC / Rudolph Technologies, Inc. 425 - Merger Prospectus - 8-K

8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): June 24, 2019 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commi

June 24, 2019 EX-99.1

NANOMETRICS – RUDOLPH TECHNOLOGIES MERGER CALL Moderator: Steve Roth June 24, 2019 8:30 a.m. ET

EX-99.1 Exhibit 99.1 NANOMETRICS – RUDOLPH TECHNOLOGIES MERGER CALL Moderator: Steve Roth 06-24-19/8:30 a.m. ET Confirmation # 7362935 NANOMETRICS – RUDOLPH TECHNOLOGIES MERGER CALL Moderator: Steve Roth June 24, 2019 8:30 a.m. ET OPERATOR: This is Conference #: 7362935 Operator: Ladies and gentlemen, thank you for standing by. Welcome to today’s conference call to discuss the Nanometrics and Rudo

June 24, 2019 EX-99.5

Forward-Looking Statements This communication contains “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 that are subject to risks and uncertainties and are made pursuant to the safe harbor provis

EX-99.5 Creating A Premier Process Control Company Nanometrics and Rudolph Technologies Merger June 24, 2019 Exhibit 99.5 Forward-Looking Statements This communication contains “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 that are subject to risks and uncertainties and are made pursuant to the safe harbor provisions of Section 27A of the S

June 24, 2019 EX-99.4

Dear Valued Customer,

EX-99.4 Exhibit 99.4 Dear Valued Customer, I wanted to reach out to share some exciting news. Today, Nanometrics and Rudolph announced an agreement to merge. Together, we’ll be a premier end-to-end metrology, inspection, process control software, and lithography equipment provider for the semiconductor industry and other advanced markets. You can find the press release announcing the news and addi

June 24, 2019 EX-99.6

Forward-Looking Statements This communication contains “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 that are subject to risks and uncertainties and are made pursuant to the safe harbor provis

EX-99.6 Creating A Premier Process Control Company Nanometrics and Rudolph Technologies Merger June 24, 2019 Exhibit 99.6 Forward-Looking Statements This communication contains “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 that are subject to risks and uncertainties and are made pursuant to the safe harbor provisions of Section 27A of the S

June 24, 2019 EX-2.1

Agreement and Plan of Merger, dated as of June 23, 2019, by and among Nanometrics Incorporated, Rudolph Technologies, Inc. and PV Equipment Inc. (incorporated herein by reference to Exhibit 2.1 to Current Report on Form 8-K filed by Rudolph Technologies, Inc. with the SEC on June 24, 2019).*

EX-2.1 2 d755825dex21.htm EX-2.1 Table of Contents Exhibit 2.1 CONFIDENTIAL Execution Version AGREEMENT AND PLAN OF MERGER by and among NANOMETRICS INCORPORATED, RUDOLPH TECHNOLOGIES, INC., AND PV EQUIPMENT INC. dated as of June 23, 2019 Table of Contents TABLE OF CONTENTS Page ARTICLE I THE MERGER 1 Section 1.1 The Merger 1 Section 1.2 Closing 2 Section 1.3 Effective Time 2 Section 1.4 Certificat

June 24, 2019 EX-99.2

This is a very exciting day for Rudolph!

EX-99.2 Exhibit 99.2 Team, This is a very exciting day for Rudolph! Moments ago, we announced that we have signed an agreement to merge with Nanometrics, a leading provider of metrology systems and analytics for the most advanced semiconductor manufacturing processes. Nanometrics is a leader in the OCD technology required for a growing number of critical measurements at the nanometer scale. Founde

June 24, 2019 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year, Entry into a Material Definitive Agreement, Financial Statements and Exhibits, Other Events

8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): June 21, 2019 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commi

June 24, 2019 EX-10.1

Form of Indemnity Agreement

EX-10.1 Exhibit 10.1 RUDOLPH TECHNOLOGIES, INC. INDEMNITY AGREEMENT This Indemnity Agreement (this “Agreement”) dated as of , 20 is made by and between Rudolph Technologies, Inc., a Delaware corporation (the “Company”), and , a director or officer of the Company or one of the Company’s subsidiaries (“Indemnitee”). RECITALS A. The Company is aware that competent and experienced persons are increasi

June 24, 2019 EX-3.1

Amendment to Restated Bylaws of Rudolph Technologies, Inc., effective June 23, 2019

EX-3.1 Exhibit 3.1 Amendment to Restated Bylaws of Rudolph Technologies, Inc. The Restated Bylaws of Rudolph Technologies, Inc. are hereby amended by adding thereto the following provision as a new Section 8.13 thereof: “8.13 Exclusive Forum. Unless the corporation consents in writing to the selection of an alternative forum, the Court of Chancery of the State of Delaware (or, if the Court of Chan

June 24, 2019 EX-99.3

Dear Valued Supplier,

EX-99.3 Exhibit 99.3 Dear Valued Supplier, I wanted to reach out to share some exciting news. Today, Nanometrics and Rudolph announced an agreement to merge. Together, we’ll be a premier end-to-end metrology, inspection, process control software, and lithography equipment provider for the semiconductor industry and other advanced markets. You can find the press release announcing the news and addi

June 24, 2019 EX-99.1

Nanometrics and Rudolph Announce Merger Agreement To Create a Premier Semiconductor Process Control Complementary products and increased scale will benefit consolidated customer base Combination increases served available market (SAM) opportunity to

EX-99.1 Exhibit 99.1 Nanometrics and Rudolph Announce Merger Agreement To Create a Premier Semiconductor Process Control Company Complementary products and increased scale will benefit consolidated customer base Combination increases served available market (SAM) opportunity to approximately $3B Global Scale: accelerates R&D in complementary competencies while increasing worldwide customer presenc

June 24, 2019 EX-2.1

Agreement and Plan of Merger, dated June 23, 2019, by and among Rudolph Technologies, Inc., Nanometrics Incorporated, and PV Equipment, Inc.

EX-2.1 Table of Contents Exhibit 2.1 CONFIDENTIAL Execution Version AGREEMENT AND PLAN OF MERGER by and among NANOMETRICS INCORPORATED, RUDOLPH TECHNOLOGIES, INC., AND PV EQUIPMENT INC. dated as of June 23, 2019 Table of Contents TABLE OF CONTENTS Page ARTICLE I THE MERGER 1 Section 1.1 The Merger 1 Section 1.2 Closing 2 Section 1.3 Effective Time 2 Section 1.4 Certificate of Incorporation; Bylaws

June 24, 2019 EX-99.3

Dear Valued Supplier,

EX-99.3 Exhibit 99.3 Dear Valued Supplier, I wanted to reach out to share some exciting news. Today, Nanometrics and Rudolph announced an agreement to merge. Together, we’ll be a premier end-to-end metrology, inspection, process control software, and lithography equipment provider for the semiconductor industry and other advanced markets. You can find the press release announcing the news and addi

June 24, 2019 EX-99.5

Forward-Looking Statements This communication contains “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 that are subject to risks and uncertainties and are made pursuant to the safe harbor provis

EX-99.5 Creating A Premier Process Control Company Nanometrics and Rudolph Technologies Merger June 24, 2019 Exhibit 99.5 Forward-Looking Statements This communication contains “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 that are subject to risks and uncertainties and are made pursuant to the safe harbor provisions of Section 27A of the S

June 24, 2019 EX-99.2

This is a very exciting day for Rudolph!

EX-99.2 Exhibit 99.2 Team, This is a very exciting day for Rudolph! Moments ago, we announced that we have signed an agreement to merge with Nanometrics, a leading provider of metrology systems and analytics for the most advanced semiconductor manufacturing processes. Nanometrics is a leader in the OCD technology required for a growing number of critical measurements at the nanometer scale. Founde

June 24, 2019 EX-99.1

Nanometrics and Rudolph Announce Merger Agreement To Create a Premier Semiconductor Process Control Complementary products and increased scale will benefit consolidated customer base Combination increases served available market (SAM) opportunity to

EX-99.1 5 d755825dex991.htm EX-99.1 Exhibit 99.1 Nanometrics and Rudolph Announce Merger Agreement To Create a Premier Semiconductor Process Control Company Complementary products and increased scale will benefit consolidated customer base Combination increases served available market (SAM) opportunity to approximately $3B Global Scale: accelerates R&D in complementary competencies while increasin

June 24, 2019 EX-99.6

Forward-Looking Statements This communication contains “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 that are subject to risks and uncertainties and are made pursuant to the safe harbor provis

EX-99.6 Creating A Premier Process Control Company Nanometrics and Rudolph Technologies Merger June 24, 2019 Exhibit 99.6 Forward-Looking Statements This communication contains “forward-looking statements” within the meaning of the Private Securities Litigation Reform Act of 1995 that are subject to risks and uncertainties and are made pursuant to the safe harbor provisions of Section 27A of the S

June 24, 2019 EX-99.4

Dear Valued Customer,

EX-99.4 Exhibit 99.4 Dear Valued Customer, I wanted to reach out to share some exciting news. Today, Nanometrics and Rudolph announced an agreement to merge. Together, we’ll be a premier end-to-end metrology, inspection, process control software, and lithography equipment provider for the semiconductor industry and other advanced markets. You can find the press release announcing the news and addi

June 24, 2019 EX-10.1

Form of Indemnity Agreement

EX-10.1 Exhibit 10.1 RUDOLPH TECHNOLOGIES, INC. INDEMNITY AGREEMENT This Indemnity Agreement (this “Agreement”) dated as of , 20 is made by and between Rudolph Technologies, Inc., a Delaware corporation (the “Company”), and , a director or officer of the Company or one of the Company’s subsidiaries (“Indemnitee”). RECITALS A. The Company is aware that competent and experienced persons are increasi

June 24, 2019 425

RTEC / Rudolph Technologies, Inc. 425 - Merger Prospectus - 8-K

8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): June 21, 2019 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commi

June 24, 2019 EX-3.1

Amendment to Restated Bylaws of Rudolph Technologies, Inc., effective June 23, 2019

EX-3.1 Exhibit 3.1 Amendment to Restated Bylaws of Rudolph Technologies, Inc. The Restated Bylaws of Rudolph Technologies, Inc. are hereby amended by adding thereto the following provision as a new Section 8.13 thereof: “8.13 Exclusive Forum. Unless the corporation consents in writing to the selection of an alternative forum, the Court of Chancery of the State of Delaware (or, if the Court of Chan

May 31, 2019 SD

RTEC / Rudolph Technologies, Inc. SD - - SD

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM SD Specialized Disclosure Report RUDOLPH TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware 000-27965 22-3531208 (State or other jurisdiction of incorporation or organization) (Commission File Number) (I.R.S. Employer Identification Number) 16 Jonspin Road, Wilmington, Massachusetts 01887 (

May 31, 2019 EX-1.01

Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form.

Exhibit 1.01 Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934 This is the Conflict Minerals Report of Rudolph Technologies, Inc. (“Rudolph”, the “Company,” “we,” “us,” or “our”) for the year ended December 31, 2018 in accordance with Rule 13p-1 under the Securities Exchange Act of 1934 (the “Rule”). The Rule was adopted

May 15, 2019 8-K

Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 6, 2019 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commission

May 7, 2019 10-Q

Quarterly Report - 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended March 31, 2019 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 001-3

May 6, 2019 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2019 FIRST QUARTER EARNINGS •First quarter revenue and earnings at high end of guidance

EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2019 FIRST QUARTER EARNINGS •First quarter revenue and earnings at high end of guidance • Gross profit margin improves on strong software revenue WILMINGTON, MASSACHUSETTS (May 6, 2019) – Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of semiconductor process control systems, lithography equipment, as well as process control and yield manageme

May 6, 2019 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 6, 2019 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commission

April 2, 2019 DEFA14A

Schedule 14A

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐Preliminary Proxy Statement ☐Confidential, for Use of the Commission Only (as permitted by Rule 14a-6(e)(2)) ☐Definitive Proxy Statemen

April 2, 2019 DEFA14A

RTEC / Rudolph Technologies, Inc. DEFA14A

DEFA14A 1 rtec-defa14a20190515.htm DEFA14A UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐Preliminary Proxy Statement ☐Confidential, for Use of the Commission Only (as permitted by R

April 2, 2019 DEF 14A

RTEC / Rudolph Technologies, Inc. DEF 14A

DEF 14A 1 rtec-def14a20190515.htm DEF 14A UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by

February 15, 2019 EX-3.2

Restated Bylaws of Registrant as amended, filed with this report.

EX-3.2 2 rtec-ex32504.htm EX-3.2 Exhibit 3.2 RESTATED BYLAWS OF RUDOLPH TECHNOLOGIES, INC. (as amended January 27, 2009) table of contents Page ARTICLE I CORPORATE OFFICES1 1.1 REGISTERED OFFICE1 1.2 OTHER OFFICES1 ARTICLE II MEETINGS OF STOCKHOLDERS1 2.1 PLACE OF MEETINGS1 2.2 ANNUAL MEETING1 2.3 SPECIAL MEETING1 2.4 NOTICE OF STOCKHOLDERS' MEETINGS2 2.5 ADVANCE NOTICE OF STOCKHOLDER NOMINEES AND

February 15, 2019 EX-21.1

SUBSIDIARIES

EX-21.1 3 rtec-ex2116.htm EX-21.1 Exhibit 21.1 SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Asia Limited Hong Kong

February 15, 2019 10-K

Annual Report - 10-K

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Fiscal Year Ended December 31, 2018 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 001-36226

February 12, 2019 SC 13G/A

RTEC / Rudolph Technologies, Inc. / VANGUARD GROUP INC Passive Investment

SC 13G/A 1 rudolphtechnologiesinc.htm SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 1 )* Name of issuer: Rudolph Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 781270103 Date of Event Which Requires Filing of this Statement: December 31, 2018 Check the appropriate box to designate the rule

February 8, 2019 SC 13G/A

RTEC / Rudolph Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G/A Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 3)* RUDOLPH TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2018 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which thi

February 4, 2019 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 4, 2019 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commis

February 4, 2019 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2018 FOURTH QUARTER and FULL YEAR RESULTS •Fourth quarter revenue growth driven by inspection systems increasing 20 percent •Full year 2018 produced fourth consecutive record revenue

RUDOLPH TECHNOLOGIES REPORTS 2018 FOURTH QUARTER and FULL YEAR RESULTS •Fourth quarter revenue growth driven by inspection systems increasing 20 percent •Full year 2018 produced fourth consecutive record revenue WILMINGTON, MASSACHUSETTS (February 4, 2019) – Rudolph Technologies, Inc.

November 2, 2018 10-Q

RTEC / Rudolph Technologies, Inc. 10-Q (Quarterly Report)

10-Q 1 rtec-10q20180930.htm 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended September 30, 2018 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition per

November 1, 2018 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec-8k20180930.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 1, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdic

November 1, 2018 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2018 THIRD QUARTER RESULTS •Tracking to fourth consecutive record revenue year •JetStep® system selected for Wafer Level Chip Scale Package application

EX-99.1 2 rtec-ex99115.htm EX-99.1 EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2018 THIRD QUARTER RESULTS •Tracking to fourth consecutive record revenue year •JetStep® system selected for Wafer Level Chip Scale Package application WILMINGTON, MASSACHUSETTS (November 1, 2018) – Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of semiconductor process control systems, lithography equipment,

November 1, 2018 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS

S-8 POS 1 rtec-s8pos.htm S-8 POS As filed with the Securities and Exchange Commission on November 1, 2018 Registration No. 333-92443 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 POST-EFFECTIVE AMENDMENT NO. 1 TO Form S-8 Registration Statement No. 333-92443 Form S-8 Registration Statement No. 333-104349 Form S-8 Registration Statement No. 333-129773 Form S-8 Registration

November 1, 2018 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS

S-8 POS 1 rtec-s8pos.htm S-8 POS As filed with the Securities and Exchange Commission on November 1, 2018 Registration No. 333-172927 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 POST-EFFECTIVE AMENDMENT NO. 1 TO Form S-8 Registration Statement No. 333-92443 Form S-8 Registration Statement No. 333-104349 Form S-8 Registration Statement No. 333-129773 Form S-8 Registratio

November 1, 2018 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS

S-8 POS 1 rtec-s8pos.htm S-8 POS As filed with the Securities and Exchange Commission on November 1, 2018 Registration No. 333-163240 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 POST-EFFECTIVE AMENDMENT NO. 1 TO Form S-8 Registration Statement No. 333-92443 Form S-8 Registration Statement No. 333-104349 Form S-8 Registration Statement No. 333-129773 Form S-8 Registratio

November 1, 2018 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS

S-8 POS 1 rtec-s8pos.htm S-8 POS As filed with the Securities and Exchange Commission on November 1, 2018 Registration No. 333-149705 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 POST-EFFECTIVE AMENDMENT NO. 1 TO Form S-8 Registration Statement No. 333-92443 Form S-8 Registration Statement No. 333-104349 Form S-8 Registration Statement No. 333-129773 Form S-8 Registratio

November 1, 2018 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS

S-8 POS 1 rtec-s8pos.htm S-8 POS As filed with the Securities and Exchange Commission on November 1, 2018 Registration No. 333-132283 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 POST-EFFECTIVE AMENDMENT NO. 1 TO Form S-8 Registration Statement No. 333-92443 Form S-8 Registration Statement No. 333-104349 Form S-8 Registration Statement No. 333-129773 Form S-8 Registratio

November 1, 2018 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS

S-8 POS 1 rtec-s8pos.htm S-8 POS As filed with the Securities and Exchange Commission on November 1, 2018 Registration No. 333-129773 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 POST-EFFECTIVE AMENDMENT NO. 1 TO Form S-8 Registration Statement No. 333-92443 Form S-8 Registration Statement No. 333-104349 Form S-8 Registration Statement No. 333-129773 Form S-8 Registratio

November 1, 2018 S-8 POS

RTEC / Rudolph Technologies, Inc. S-8 POS

S-8 POS 1 rtec-s8pos.htm S-8 POS As filed with the Securities and Exchange Commission on November 1, 2018 Registration No. 333-104349 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 POST-EFFECTIVE AMENDMENT NO. 1 TO Form S-8 Registration Statement No. 333-92443 Form S-8 Registration Statement No. 333-104349 Form S-8 Registration Statement No. 333-129773 Form S-8 Registratio

October 29, 2018 8-K

Financial Statements and Exhibits

8-K 1 rtec-8k20181029.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 29, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdic

October 29, 2018 EX-99.1

Rudolph Technologies Completes Existing Stock Repurchase Plan and Authorizes an Additional $40 Million Share Repurchase Plan

EX-99.1 2 rtec-ex9917.htm EX-99.1 Exhibit 99.1 News Rudolph Technologies Completes Existing Stock Repurchase Plan and Authorizes an Additional $40 Million Share Repurchase Plan Rudolph Technologies repurchased $14.3 million of stock in the 2018 fourth quarter. Wilmington, Mass. (October 29, 2018)—Rudolph Technologies, Inc. (NYSE: RTEC) today announced that it has completed its 2015 stock repurchas

October 3, 2018 EX-99.1

Rudolph Technologies Revises 2018 Third Quarter Guidance Ahead of Scheduled Financial Results Conference Call on November 1, 2018

EX-99.1 2 rtec-ex9917.htm EX-99.1 News Rudolph Technologies Revises 2018 Third Quarter Guidance Ahead of Scheduled Financial Results Conference Call on November 1, 2018 Wilmington, Mass. (October 3, 2018)— Rudolph Technologies, Inc. (NYSE: RTEC) has revised its third quarter revenue to a range of $59 to $61 million ahead of its 2018 third quarter earnings call to be held November 1, 2018. In that

October 3, 2018 8-K

Financial Statements and Exhibits, Other Events

8-K 1 rtec-8k20181003.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 3, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdict

August 9, 2018 EX-99.1

Rudolph Technologies Appoints David B. Miller as Chairman of the Board

Exhibit 99.1 News Rudolph Technologies Appoints David B. Miller as Chairman of the Board Wilmington, Mass. (August 8, 2018)—Rudolph Technologies, Inc. (NYSE: RTEC, the “Company”) announces the appointment of David B. Miller to the role of Chairman of the Board of Directors (the “Board”) with an effective date of August 5, 2018. Mr. Miller’s appointment is subsequent to the Company’s receipt of Tho

August 9, 2018 8-K

Financial Statements and Exhibits, Other Events

8-K 1 rtec-8k20180805.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 5, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdicti

August 2, 2018 8-K

Financial Statements and Exhibits

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 2, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commissi

August 2, 2018 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2018 SECOND QUARTER RESULTS •Quarterly record revenue of $77.5 million •Software sales drive margins to high end of guidance

EX-99.1 2 rtec-ex9916.htm EX-99.1 Exhibit 99.1 RUDOLPH TECHNOLOGIES REPORTS 2018 SECOND QUARTER RESULTS •Quarterly record revenue of $77.5 million •Software sales drive margins to high end of guidance WILMINGTON, MASSACHUSETTS (August 2, 2018) – Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of semiconductor process control systems, lithography equipment, as well as process control an

August 2, 2018 10-Q

RTEC / Rudolph Technologies, Inc. 10-Q (Quarterly Report)

10-Q 1 rtec-10q20180630.htm 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended June 30, 2018 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period f

August 2, 2018 EX-10.1

Form of Stock Unit Purchase Agreements pursuant to the Rudolph Technologies, Inc. 2018 Stock Plan.

Exhibit 10.1 Rudolph Technologies, Inc. Employee Performance Stock Unit Purchase Agreement THIS AGREEMENT (“Agreement”), dated , 20(the “Award Date”), is made between Rudolph Technologies, Inc., a Delaware corporation, hereinafter referred to as the “Company,” and (the “Participant”). 1.Definitions. All capitalized terms used in this Agreement without definition shall have the meanings ascribed in

August 2, 2018 EX-10.2

Form of Stock Option Agreements pursuant to the Rudolph Technologies, Inc. 2018 Stock Plan.

Exhibit 10.2 Rudolph Technologies, Inc. Employee Stock Option Agreement THIS AGREEMENT, dated , 20(the “Grant Date”), is made between Rudolph Technologies, Inc., a Delaware corporation, hereinafter referred to as the “Company,” and(the “Optionee”). 1.Definitions. All capitalized terms used in this Agreement without definition shall have the meanings ascribed in Company’s 2018 Stock Plan, as amende

July 31, 2018 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

8-K 1 rtec-8k20180730.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 26, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdictio

May 23, 2018 EX-1.01

Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form

Exhibit 1.01 Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934 This is the Conflict Minerals Report of Rudolph Technologies, Inc. (“Rudolph”, the “Company,” “we,” “us,” or “our”) for the year ended December 31, 2017 in accordance with Rule 13p-1 under the Securities Exchange Act of 1934 (the “Rule”). The Rule was adopted

May 23, 2018 SD

RTEC / Rudolph Technologies, Inc. SD

SD 1 rtec-sd.htm SD UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM SD Specialized Disclosure Report RUDOLPH TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware 000-27965 22-3531208 (State or other jurisdiction of incorporation or organization) (Commission File Number) (I.R.S. Employer Identification Number) 16 Jonspin Road, Wilmington, M

May 16, 2018 EX-10.2

Rudolph Technologies, Inc. 2018 Employee Stock Purchase Plan.

EXHIBIT 10.2 RUDOLPH TECHNOLOGIES, INC. 2018 EMPLOYEE STOCK PURCHASE PLAN 1. Purpose of the Plan. The purpose of the Plan is to provide employees of the Company and its Designated Subsidiaries with an opportunity to purchase Common Stock of the Company. It is the intention of the Company to have the Plan qualify as an “Employee Stock Purchase Plan” under Section 423 of the Internal Revenue Code of

May 16, 2018 S-8

Form S-8

S-8 1 rtec-s8.htm S-8 As filed with the Securities and Exchange Commission on May 16, 2018 Registration No. 333- UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM S-8 REGISTRATION STATEMENT UNDER THE SECURITIES ACT OF 1933 RUDOLPH TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware 22-3531208 (State or other jurisdiction of incorporation or

May 16, 2018 EX-10.1

Rudolph Technologies, Inc. 2018 Stock Plan

Exhibit 10.1 RUDOLPH TECHNOLOGIES, INC. 2018 STOCK PLAN 1. Purposes of the Plan. The purposes of this 2018 Stock Plan are: • to attract and retain the best available personnel for positions of substantial responsibility, • to provide additional incentive to Employees, Directors and Consultants, and • to promote the success of the Company’s business. The Plan permits the grant of Incentive Stock Op

May 16, 2018 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Submission of Matters to a Vote of Security Holders

8-K 1 rtec-8k20180516.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 16, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction

May 3, 2018 10-Q

RTEC / Rudolph Technologies, Inc. 10-Q (Quarterly Report)

10-Q 1 rtec-10q20180331.htm 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended March 31, 2018 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period

May 2, 2018 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2018 FIRST QUARTER RESULTS

EX-99.1 2 rtec-ex9918.htm EX-99.1 RUDOLPH TECHNOLOGIES REPORTS 2018 FIRST QUARTER RESULTS •Quarterly record revenue of $73 million, increased 22 percent sequentially •Earnings per share exceeded guidance WILMINGTON, MASSACHUSETTS (May 2, 2018) – Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of semiconductor process control systems, lithography equipment, as well as process control an

May 2, 2018 8-K

Financial Statements and Exhibits

8-K 1 rtec-8k20180331.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 2, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction

April 18, 2018 DEF 14A

RTEC / Rudolph Technologies, Inc. DEF 14A

DEF 14A 1 rtec-def14a20180418.htm DEF 14A UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by

February 16, 2018 10-K

RTEC / Rudolph Technologies, Inc. 10-K (Annual Report)

10-K 1 rtec-10k20171231.htm 10-K Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Fiscal Year Ended December 31, 2017 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from

February 16, 2018 EX-21.1

Rudolph Technologies Europe, B.V.

EX-21.1 2 rtec-ex21114.htm EX-21.1 Exhibit 21.1 SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limited Hong Kong

February 9, 2018 SC 13G

RTEC / Rudolph Technologies, Inc. / VANGUARD GROUP INC Passive Investment

SC 13G 1 rudolphtechnologiesinc.htm SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 0 )* Name of issuer: Rudolph Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 781270103 Date of Event Which Requires Filing of this Statement: December 31, 2017 Check the appropriate box to designate the rule p

February 9, 2018 SC 13G/A

RTEC / Rudolph Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G/A Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 2)* RUDOLPH TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2017 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which thi

February 1, 2018 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2017 FOURTH QUARTER AND FULL YEAR RESULTS

rtec-ex99117.htm EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2017 FOURTH QUARTER AND FULL YEAR RESULTS ? Quarterly Revenue Increased 11 Percent over Prior Year Period ? Full Year 2017 Produced Record Revenue and Backlog Driven by Memory and Specialty Device Markets WILMINGTON, MASSACHUSETTS (February 1, 2018) ? Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of semiconductor process cont

February 1, 2018 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

rtec-8k20171231.htm UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 1, 2018 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of in

October 31, 2017 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended September 30, 2017 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 0

October 30, 2017 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2017 THIRD QUARTER RESULTS

rtec-ex9916.htm EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2017 THIRD QUARTER RESULTS ? Quarterly Revenue Increased 9 Percent over Prior Year Period ? Earnings Per Share at High-End of Guidance ? On Track for Third Year of Record Revenue WILMINGTON, MASSACHUSETTS (October 30, 2017) ? Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of semiconductor process control systems, lithography eq

October 30, 2017 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec-8k20170930.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 30, 2017 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdic

September 14, 2017 8-K

Regulation FD Disclosure, Financial Statements and Exhibits

8-K 1 a8k9142017.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 14, 2017 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdictio

September 14, 2017 EX-99.1

Analyst Day 2017 Welcome Mike Sheaffer Safe Harbor This presentation contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include Rudolph’s business momentum and future growt

rtecanalystdaysept2017 Analyst Day 2017 Welcome Mike Sheaffer Safe Harbor This presentation contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the ?Act?) which include Rudolph?s business momentum and future growth; the benefit to customers of Rudolph?s products and customer service; Rudolph?s ability to both deliver products and services consistent with our customers? demands and expectations and strengthen its market position; Rudolph?s expectations regarding semiconductor market outlook; as well as other matters that are not purely historical data.

August 23, 2017 CORRESP

RTEC / Rudolph Technologies, Inc. ESP

CORRESP 1 filename1.htm August 23, 2017 Via EDGAR Securities and Exchange Commission Division of Corporate Finance 450 Fifth Street, N.W. Washington, DC 20549 Attention: Martin James Senior Assistant Chief Accountant Re: Rudolph Technologies, Inc. Form 10-K for the Year Ended December 31, 2016 Filed February 16, 2017 File No. 1-36226 Dear Mr. James: On behalf of Rudolph Technologies, Inc., a Delaw

August 3, 2017 EX-10.12

Rudolph Technologies, Inc. Employee Restricted Stock Unit Purchase Agreement

Exhibit 10.12 Rudolph Technologies, Inc. Employee Restricted Stock Unit Purchase Agreement THIS AGREEMENT (“Agreement”), dated , 20 (the “Award Date”), is made between Rudolph Technologies, Inc., a Delaware corporation, hereinafter referred to as the “Company,” and (the “Participant”). 1. Definitions. All capitalized terms used in this Agreement without definition shall have the meanings ascribed

August 3, 2017 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended June 30, 2017 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 001-36

August 2, 2017 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec8k2017q2.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 2, 2017 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction

August 2, 2017 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2017 SECOND QUARTER RESULTS • Quarterly Revenue Exceeds All Previous Periods • Revenue Up Eleven Percent Sequentially • On Track for Third Year of Record Revenue

Exhibit EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2017 SECOND QUARTER RESULTS ? Quarterly Revenue Exceeds All Previous Periods ? Revenue Up Eleven Percent Sequentially ? On Track for Third Year of Record Revenue WILMINGTON, MASSACHUSETTS (August 2, 2017) - Rudolph Technologies, Inc . (NYSE: RTEC), a leading provider of semiconductor process control systems, lithography equipment, as well as proces

July 31, 2017 EX-99.1

Rudolph Concludes Patent Infringement Lawsuit Against Camtek Agreement will end ongoing litigation and close intellectual property claims

EX-99.1 2 ex9918k7312017.htm EXHIBIT 99.1 Exhibit 99.1 Rudolph Concludes Patent Infringement Lawsuit Against Camtek Agreement will end ongoing litigation and close intellectual property claims Wilmington, Mass. (July 31, 2017)—Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and advanced packaging f

July 31, 2017 8-K

Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 31, 2017 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commissio

May 25, 2017 SD

Rudolph Technologies SD

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM SD Specialized Disclosure Report RUDOLPH TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware 000-27965 22-3531208 (State or other jurisdiction of incorporation or organization) (Commission File Number) (I.R.S. Employer Identification Number) 16 Jonspin Road, Wilmington, Massachusetts 01887 (

May 25, 2017 EX-1.01

Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934

Exhibit Exhibit 1.01 Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934 This is the Conflict Minerals Report of Rudolph Technologies, Inc. (?Rudolph?, the ?Company,? ?we,? ?us,? or ?our?) for the year ended December 31, 2016 in accordance with Rule 13p-1 under the Securities Exchange Act of 1934 (the ?Rule?). The Rule was

May 18, 2017 8-K

Submission of Matters to a Vote of Security Holders

Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 17, 2017 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (C

May 2, 2017 10-Q

Rudolph Technologies 10-Q (Quarterly Report)

10-Q 1 rtec10qq12017.htm 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended March 31, 2017 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period fro

May 1, 2017 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec8k2017q1.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 1, 2017 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of

May 1, 2017 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2017 FIRST QUARTER RESULTS

Exhibit EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2017 FIRST QUARTER RESULTS ? Revenue and Earnings Exceed Consensus; Guides Up for Second Quarter; ? Revenue Up Twelve Percent Sequentially and Year-Over-Year WILMINGTON, MASSACHUSETTS (May 1, 2017) - Rudolph Technologies, Inc . (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs

April 18, 2017 DEF 14A

Rudolph Technologies DEF 14A

DEF 14A 1 rtec2017proxydef.htm DEF 14A Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 Filed by the Registrant x Filed by a Party other than the Registrant ¨ Check the appropriate box: ¨ Preliminary Proxy Statement ¨ Confidential, for Use of the Commission Only (a

February 17, 2017 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 17, 2017 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commi

February 16, 2017 10-K

Rudolph Technologies 10-K (Annual Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) x ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Fiscal Year Ended December 31, 2016 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 001-36226

February 16, 2017 EX-21.1

SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limit

Exhibit 21.1 SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limited Hong Kong

February 16, 2017 EX-10.12

Rudolph Technologies, Inc. Employee Restricted Stock Unit Purchase Agreement

Exhibit 10.12 Rudolph Technologies, Inc. Employee Restricted Stock Unit Purchase Agreement THIS AGREEMENT (“Agreement”), dated , 20 (the “Award Date”), is made between Rudolph Technologies, Inc., a Delaware corporation, hereinafter referred to as the “Company,” and (the “Participant”). 1. Definitions. All capitalized terms used in this Agreement without definition shall have the meanings ascribed

February 9, 2017 SC 13G

RTEC / Rudolph Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G Passive Investment

SC 13G 1 dfs127.htm SCHEDULE 13G UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* RUDOLPH TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2016 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designat

February 2, 2017 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec8k2016q4.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 2, 2017 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdictio

February 2, 2017 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2016 FOURTH QUARTER AND YEAR END RESULTS ● Lithography and Software Drive Second Consecutive Record Sales Year; ● Growth Driven by Advanced Packaging For Mobile Devices; ● Fourth Quarter Revenue Up Six Percent Year-Over-Y

Exhibit EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2016 FOURTH QUARTER AND YEAR END RESULTS ? Lithography and Software Drive Second Consecutive Record Sales Year; ? Growth Driven by Advanced Packaging For Mobile Devices; ? Fourth Quarter Revenue Up Six Percent Year-Over-Year WILMINGTON, MASSACHUSETTS (February 2, 2017) - Rudolph Technologies, Inc . (NYSE: RTEC), a leading provider of process charac

December 22, 2016 EX-99.1

Rudolph Announces Ruling in Patent Reexamination Appeal by Camtek Opinion rendered which confirmed validity of additional patent claims

Exhibit Exhibit 99.1 Rudolph Announces Ruling in Patent Reexamination Appeal by Camtek Opinion rendered which confirmed validity of additional patent claims Wilmington, Massachusetts (December 22, 2016)-Rudolph Technologies, Inc. (NYSE: RTEC) announced today that the U.S. Court of Appeals for the Federal Circuit has issued a ruling regarding Camtek Ltd.?s requested reexamination of Rudolph?s U.S.

December 22, 2016 8-K

Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 22, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commi

November 8, 2016 10-Q

Rudolph Technologies 10-Q (Quarterly Report)

Document Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.

November 7, 2016 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec8k2016q3.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 7, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdictio

November 7, 2016 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2016 THIRD QUARTER RESULTS

Exhibit EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2016 THIRD QUARTER RESULTS ? Process Control Equipment Sales Drive Year-over-Year Growth; ? First Semi Panel Lithography System Ships in the Quarter WILMINGTON, MASSACHUSETTS (November 7, 2016) - Rudolph Technologies, Inc . (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and

November 4, 2016 SC 13G/A

RTEC / Rudolph Technologies, Inc. / GAGNON NEIL - SC 13G/A Passive Investment

SC 13G/A 1 rudolph13ga3.htm SC 13G/A UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 3)* RUDOLPH TECHNOLOGIES, INC. (Name of Issuer) Common Stock, $0.001 par value per share (Title of Class of Securities) 781270103 (CUSIP Number) Copies to: David A. Sirignano Sean M. Donahue Morgan, Lewis & Bockius LLP

October 12, 2016 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 7, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commiss

July 29, 2016 10-Q

Rudolph Technologies 10-Q (Quarterly Report)

Document Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.

July 28, 2016 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 28, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (

July 28, 2016 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2016 SECOND QUARTER RESULTS • Strong Lithography Sales Drive Record Quarterly Revenue • Earnings Exceed Guidance

Exhibit EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2016 SECOND QUARTER RESULTS ? Strong Lithography Sales Drive Record Quarterly Revenue ? Earnings Exceed Guidance WILMINGTON, MASSACHUSETTS (July 28, 2016) - Rudolph Technologies, Inc . (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and advanced packaging facilities, today an

July 18, 2016 8-K

Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 15, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commissio

July 18, 2016 EX-99.1

Rudolph Redeems $60 Million in Convertible Notes

EX-99.1 2 ex9918k7152016.htm EXHIBIT 99.1 Exhibit 99.1 Rudolph Redeems $60 Million in Convertible Notes Wilmington, Mass. (July 15, 2016) – Rudolph Technologies, Inc. (NYSE:RTEC), a leader in the design, development, manufacture and support of defect inspection, lithography, process control metrology, and process control software used by semiconductor and advanced packaging device manufacturers wo

May 27, 2016 EX-1.01

Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934

Exhibit 1.01 Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934 This is the Conflict Minerals Report of Rudolph Technologies, Inc. (“Rudolph”, the “Company,” “we,” “us,” or “our”) for the year ended December 31, 2015 in accordance with Rule 13p-1 under the Securities Exchange Act of 1934 (the “Rule”). The Rule was adopted

May 27, 2016 SD

Rudolph Technologies SD

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM SD Specialized Disclosure Report RUDOLPH TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware 000-27965 22-3531208 (State or other jurisdiction of incorporation or organization) (Commission File Number) (I.R.S. Employer Identification Number) 16 Jonspin Road, Wilmington, Massachusetts 01887 (

May 19, 2016 8-K

Rudolph Technologies 8-K (Current Report/Significant Event)

SEC Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 18, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation

May 9, 2016 8-K

Financial Statements and Exhibits, Other Events

8-K 1 a8k592016.htm 8-K 5.9.2016 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 9, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdicti

May 9, 2016 EX-99.1

Rudolph Technologies Appoints Debbora Ahlgren as Vice President of Global Customer Operations

Exhibit Exhibit 99.1 Rudolph Technologies Appoints Debbora Ahlgren as Vice President of Global Customer Operations Wilmington, Mass. (May 9, 2016)-Rudolph Technologies, Inc. (NYSE: RTEC) is pleased to announce the appointment of Debbora Ahlgren as vice president of global customer operations, leading the company?s sales and service organization. ?Debbora?s extensive field operations experience for

May 3, 2016 10-Q

Rudolph Technologies 10-Q (Quarterly Report)

10-Q 1 rtec10qq12016.htm 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended March 31, 2016 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period fro

May 2, 2016 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2016 FIRST QUARTER RESULTS

EX-99.1 2 ex991q12016.htm EXHIBIT 99.1 EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2016 FIRST QUARTER RESULTS • Strong Sales of Process Control Solutions Drive Increase in Results to High-End of Guidance WILMINGTON, MASSACHUSETTS (May 2, 2016) - Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and adv

May 2, 2016 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 2, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commission

April 21, 2016 DEF 14A

Rudolph Technologies DEF 14A

DEF 14A 1 rtec2016proxydef.htm DEF 14A Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 Filed by the Registrant x Filed by a Party other than the Registrant ¨ Check the appropriate box: ¨ Preliminary Proxy Statement ¨ Confidential, for Use of the Commission Only (a

April 1, 2016 8-K

Rudolph Technologies 8-K (Current Report/Significant Event)

8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 31, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Comm

March 22, 2016 8-K

Regulation FD Disclosure

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 22, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Commissi

February 19, 2016 10-K

RTEC / Rudolph Technologies, Inc. 10-K - Annual Report - 10-K

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) x ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Fiscal Year Ended December 31, 2015 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 001-36226

February 19, 2016 EX-21.1

SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limit

Exhibit 21.1 SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limited Hong Kong Stella Alliance, LLC Massachusetts

February 12, 2016 SC 13G/A

RTEC / Rudolph Technologies, Inc. / GAGNON NEIL - SC 13G/A Passive Investment

SC 13G/A 1 rudolph13ga2.htm SC 13G/A UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 2)* RUDOLPH TECHNOLOGIES, INC. (Name of Issuer) Common Stock, $0.001 par value per share (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2015 (Date of Event Which Requires Filing of this Statement)

February 9, 2016 SC 13G

RTEC / Rudolph Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G Passive Investment

SC 13G 1 rrd458.htm SCHEDULE 13G UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* RUDOLPH TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2015 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designat

February 5, 2016 8-K

Rudolph Technologies 8-K (Current Report/Significant Event)

8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 3, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Co

February 5, 2016 EX-99.1

Rudolph Announces Win in Patent Infringement Lawsuit against Camtek Judgment rendered in first of three patent infringement lawsuits

Exhibit Exhibit 99.1 Rudolph Announces Win in Patent Infringement Lawsuit against Camtek Judgment rendered in first of three patent infringement lawsuits Flanders, New Jersey (February 3, 2016)?Rudolph Technologies, Inc. (NYSE: RTEC) announced today that the U.S. Court of Appeals for the Federal Circuit has affirmed a lower court decision that Camtek, Ltd. infringed Rudolph?s U.S. Patent No. 6,826

February 1, 2016 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 1, 2016 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Co

February 1, 2016 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2015 FOURTH QUARTER AND YEAR-END RESULTS

Exhibit EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2015 FOURTH QUARTER AND YEAR-END RESULTS ? Advanced Packaging Drives Record Sales Year; ? Lithography Business Unit Completes Third Consecutive Year of Growth FLANDERS, NEW JERSEY (February 1, 2016) - Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs

November 9, 2015 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits

8-K 1 rtec8k11-9x2015.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 9, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdic

November 9, 2015 EX-10.1

EMPLOYMENT AGREEMENT

EX-10.1 2 a8k11-09x15101exhibit.htm EXHIBIT 10.1 EXHIBIT 10.1 EMPLOYMENT AGREEMENT This Employment Agreement (“Agreement”) is entered into by and between Rudolph Technologies, Inc., a Delaware corporation (the “Company”), and Michael P. Plisinski (“Executive”) dated as of November 5, 2015. WHEREAS, Executive is currently the Executive Vice President and Chief Operating Officer of the Company, purs

November 3, 2015 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

10-Q 1 rtec10qq32015.htm 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended September 30, 2015 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period

November 2, 2015 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec8k2015q3.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 2, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdictio

November 2, 2015 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2015 THIRD QUARTER RESULTS

Exhibit EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2015 THIRD QUARTER RESULTS ? Strong Top Line Results Driven By Software and Lithography Sales; ? Earnings Per Share Significantly Exceeds Guidance FLANDERS, NEW JERSEY (November 2, 2015) - Rudolph Technologies, Inc . (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and advance

September 29, 2015 EX-99.1

Rudolph Acquires Inspection Technology of Stella Alliance, LLC Acquired patents to enhance Rudolph’s inspection capabilities in advanced packaging and extend inspection into new applications

Exhibit EXHIBIT 99.1 Rudolph Acquires Inspection Technology of Stella Alliance, LLC Acquired patents to enhance Rudolph?s inspection capabilities in advanced packaging and extend inspection into new applications Flanders, New Jersey (September 29, 2015)-Rudolph Technologies, Inc. (NYSE: RTEC) announced today that it has purchased Stella Alliance, LLC, a Massachusetts-based semiconductor inspection

September 29, 2015 8-K

Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 25, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporation) (Comm

August 4, 2015 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended June 30, 2015 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 001-36

August 3, 2015 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2015 SECOND QUARTER RESULTS

Ex99.1 Q22015 EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2015 SECOND QUARTER RESULTS ? Financial Results Exceeded Guidance and Marked the Fifth Consecutive Quarter of Growth; ? Penetration into Advanced Packaging Lithography Market Continues to Gain Traction FLANDERS, NEW JERSEY (August 3, 2015) - Rudolph Technologies, Inc . (NYSE: RTEC), a leading provider of process characterization equipment, li

August 3, 2015 8-K

Rudolph Technologies 8-K (Current Report/Significant Event)

rtec8k2015 Q2 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 3, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 001-36226 22-3531208 (State or other jurisdiction of incorporat

July 29, 2015 CORRESP

Rudolph Technologies ESP

CORRESP 1 filename1.htm July 29, 2015 Via EDGAR Securities and Exchange Commission Division of Corporate Finance 450 Fifth Street, N.W. Washington, DC 20549 Attention: Martin James Senior Assistant Chief Accountant Re: Rudolph Technologies, Inc. Form 10-K for the fiscal year ended December 31, 2014 Filed February 20, 2015 Form 8-K dated April 27, 2015 Filed April 27, 2015 File No. 1-36226 Dear Mr.

July 20, 2015 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

8-K 1 rtec8k07-20x15.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 20, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction

May 27, 2015 SD

Rudolph Technologies SD

2015 Form SD UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM SD Specialized Disclosure Report RUDOLPH TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware 000-27965 22-3531208 (State or other jurisdiction of incorporation or organization) (Commission File Number) (I.R.S. Employer Identification Number) One Rudolph Road, PO Box 1000, Flande

May 27, 2015 EX-1.01

Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934

2015 Exhibit 1.01 Exhibit 1.01 Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934 This is the Conflict Minerals Report of Rudolph Technologies, Inc. (?Rudolph?, the ?Company,? ?we,? ?us,? or ?our?) for the year ended December 31, 2014 in accordance with Rule 13p-1 under the Securities Exchange Act of 1934 (the ?Rule?). The

May 22, 2015 EX-99.1

Paul F McLaughlin Chairman and CEO 2015 Annual Shareholders Meeting Flanders, New Jersey May 20, 2015 Safe Harbor Statement This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1

annualshareholdersmeetin Paul F McLaughlin Chairman and CEO 2015 Annual Shareholders Meeting Flanders, New Jersey May 20, 2015 Safe Harbor Statement This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the ?Act?) which include the benefits to customers of Rudolph?s products, Rudolph?s business momentum and future growth, Rudolph?s existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph?s ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data.

May 22, 2015 8-K

Regulation FD Disclosure, Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Submission of Matters to a Vote of Security Holders

8-K 1 a8k5202015.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 20, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of i

May 1, 2015 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

10-Q 1 rtec10qq12015.htm 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended March 31, 2015 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period fro

May 1, 2015 EX-10.1

EXECUTIVE CHANGE OF CONTROL AGREEMENT

Exhibit 10.1 EXECUTIVE CHANGE OF CONTROL AGREEMENT THIS EXECUTIVE CHANGE OF CONTROL AGREEMENT is dated as of August 20, 2009 (this ?Agreement?), by and between Rudolph Technologies, Inc., a Delaware corporation (the ?Company?), and Robert A. Koch (the ?Executive?). RECITALS WHEREAS, Company desires to create a greater incentive for Executive to remain in the employ of Company, particularly in the

April 28, 2015 DEF 14A

Rudolph Technologies DEF 14A

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 Filed by the Registrant x Filed by a Party other than the Registrant ¨ Check the appropriate box: ¨ Preliminary Proxy Statement ¨ Confidential, for Use of the Commission Only (as permitted by Rule 14a-6(e)(2)) x Defi

April 27, 2015 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2015 FIRST QUARTER RESULTS •First Quarter Revenue and Non-GAAP EPS Exceeded Guidance; •Record Quarterly Software Revenue Helped Drive 55 Percent Gross Margin

EX-99.1 2 ex991q12015.htm EXHIBIT 99.1 EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2015 FIRST QUARTER RESULTS •First Quarter Revenue and Non-GAAP EPS Exceeded Guidance; •Record Quarterly Software Revenue Helped Drive 55 Percent Gross Margin FLANDERS, NEW JERSEY (April 27, 2015) - Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment

April 27, 2015 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): April 27, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commissi

February 20, 2015 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) x ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Fiscal Year Ended December 31, 2014 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 000-27965

February 20, 2015 EX-21.1

SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limit

Exhibit 21.1 SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limited Hong Kong

February 20, 2015 EX-10.10

EXECUTIVE CHANGE OF CONTROL AGREEMENT

Exhibit 10.10 EXECUTIVE CHANGE OF CONTROL AGREEMENT THIS EXECUTIVE CHANGE OF CONTROL AGREEMENT is dated as of February 7, 2014 (this ?Agreement?), by and between Rudolph Technologies, Inc., a Delaware corporation (the ?Company?), and Richard Rogoff (the ?Executive?). RECITALS WHEREAS, Company desires to create a greater incentive for Executive to remain in the employ of Company, particularly in th

February 17, 2015 SC 13G/A

RTEC / Rudolph Technologies, Inc. / STEELHEAD PARTNERS LLC Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G* (Rule 13d-102) INFORMATION TO BE INCLUDED IN STATEMENTS FILED PURSUANT TO §240.13d-1(b), (c) AND (d) AND AMENDMENTS THERETO FILED PURSUANT TO §240.13d-2. (Amendment No. 2)* Rudolph Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value per share (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2

February 10, 2015 8-K

Financial Statements and Exhibits, Other Events

8-K 1 a8k292015.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 9, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction o

February 10, 2015 SC 13G/A

RTEC / Rudolph Technologies, Inc. / GAGNON NEIL - SCHEDULE 13G/A Passive Investment

SC 13G/A 1 rudolph13ga1.htm SCHEDULE 13G/A UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 1)* RUDOLPH TECHNOLOGIES, INC. (Name of Issuer) Common Stock, $0.001 par value per share (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2014 (Date of Event Which Requires Filing of this Stateme

February 10, 2015 EX-99.1

Ruling Issued in Rudolph’s Patent Infringement Case Against Camtek Damages and modified injunction reinstated against Camtek in US

Exhibit 99.1 Ruling Issued in Rudolph’s Patent Infringement Case Against Camtek Damages and modified injunction reinstated against Camtek in US Flanders, New Jersey (February 9, 2015)—Rudolph Technologies, Inc. (NYSE: RTEC) announced today the U.S. District Court of the District of Minnesota issued a ruling in Rudolph’s long-running patent infringement case against Camtek, Ltd. related to Rudolph’

February 5, 2015 SC 13G/A

RTEC / Rudolph Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G/A Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 1)* RUDOLPH TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2014 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which thi

February 4, 2015 EX-99.1

INTRODUCTION Paul F. McLaughlin Chairman & Chief Executive Officer 2 RUDOLPH NOW… • Q4 & FY2014 EARNINGS RELEASE • TRANSFORMATION: PROCESS CONTROLLING TO PROCESS ENABLING EVOLUTION: FROM A FE COMPANY INTO A TOTAL VALUE-ADDED SOLUTIONS PROVIDER COMBIN

a2rtec2015analysteventce INTRODUCTION Paul F. McLaughlin Chairman & Chief Executive Officer 2 RUDOLPH NOW… • Q4 & FY2014 EARNINGS RELEASE • TRANSFORMATION: PROCESS CONTROLLING TO PROCESS ENABLING EVOLUTION: FROM A FE COMPANY INTO A TOTAL VALUE-ADDED SOLUTIONS PROVIDER COMBINING FE & BE PRODUCTS, SERVICES AND SOFTWARE • BUSINESS MODEL: DELIVER PROFITS AND GENERATE CASH • TECHNICAL LEADERSHIP: MOMEN

February 4, 2015 EX-99.1

WELCOME Laura J. Guerrant Investor Relations SAFE HARBOR This presentation contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include Rudolph’s business momentum and future

a1rtec2015analysteventla WELCOME Laura J. Guerrant Investor Relations SAFE HARBOR This presentation contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include Rudolph’s business momentum and future growth; the benefit to customers of Rudolph’s products and customer service; Rudolph’s ability to both deliver products and

February 4, 2015 EX-99.1

CLOSING Paul F. McLaughlin Chairman & Chief Executive Officer RUDOLPH NOW… Positioned to Outgrow the Industry in 2015 Providing Solid Shareholder Returns Strong Customer Relationships Rich IP Portfolio Profitable…Strong Gross & Operating Margins Cash

a8rtec2015analysteventce CLOSING Paul F. McLaughlin Chairman & Chief Executive Officer RUDOLPH NOW… Positioned to Outgrow the Industry in 2015 Providing Solid Shareholder Returns Strong Customer Relationships Rich IP Portfolio Profitable…Strong Gross & Operating Margins Cash Generator 2

February 4, 2015 EX-99.1

METROLOGY BUSINESS Mike Colgan LEADING METROLOGY SOLUTIONS FOR ADVANCED PROCESSES 2 S3000SX™ SONUS™ (NEW) MetaPULSE® G • Established technologies qualified at 14nm, in R&D at 10nm • Logic, 3D Memory, MEMS, Storage, Advanced Packaging • Growth areas:

a5rtec2015analysteventmb METROLOGY BUSINESS Mike Colgan LEADING METROLOGY SOLUTIONS FOR ADVANCED PROCESSES 2 S3000SX™ SONUS™ (NEW) MetaPULSE® G • Established technologies qualified at 14nm, in R&D at 10nm • Logic, 3D Memory, MEMS, Storage, Advanced Packaging • Growth areas: mobile RF devices, SOI, TSV defect, Cu pillar bump Advanced Optical Technologies PICOSECOND ULTRASONICS LASER ELLIPSOMETRY RE

February 4, 2015 EX-99.1

RUDOLPH, LOOKING AHEAD Mike Plisinski HIGHLIGHTS FROM 2014 2 MULTIPLE POR (PROCESS OF RECORD) WINS FOR WAFER LEVEL PACKAGING APPLICATIONS STRONG DEMAND FOR RUDOLPH FROM MOBILITY AND IoT DRIVEN CUSTOMERS SECOND OSAT SELECTS JETSTEP (REVENUE IN 2015),

a3rtec2015analysteventco RUDOLPH, LOOKING AHEAD Mike Plisinski HIGHLIGHTS FROM 2014 2 MULTIPLE POR (PROCESS OF RECORD) WINS FOR WAFER LEVEL PACKAGING APPLICATIONS STRONG DEMAND FOR RUDOLPH FROM MOBILITY AND IoT DRIVEN CUSTOMERS SECOND OSAT SELECTS JETSTEP (REVENUE IN 2015), PIPELINE DOUBLES MOBILITY GROWTH FOUR QUARTERS OF GROWTH OPERATING INCOME IMPROVES BY 45% GROWTH BASED ON VALUE, NOT PRICE 3

February 4, 2015 EX-99.1

INSPECTION BUSINESS Mike Goodrich INSPECTION BUSINESS UNIT: PRODUCTS & TECHNOLOGY 2 NSX® Series Automated Inspection & Metrology Wafer Scanner™ System Bump Metrology Advanced Packaging Metrology Solder Microbump Inspection Cu Pillar Bump Inspection P

a6rtecanalysteventiburev INSPECTION BUSINESS Mike Goodrich INSPECTION BUSINESS UNIT: PRODUCTS & TECHNOLOGY 2 NSX® Series Automated Inspection & Metrology Wafer Scanner™ System Bump Metrology Advanced Packaging Metrology Solder Microbump Inspection Cu Pillar Bump Inspection Probe Mark Inspection Bare Wafer Inspection Defect & Yield Analysis Explorer® Inspection Cluster (F30™, E30™ + B30™) AWX™ Series Bare Wafer Inspection PrecisionWoRx® VX4 Probe Card Test and Analyzer BREADTH OF WAFER HANDLING 3 Bonded 200mm wafers 200mm, 300mm and whole and sawn wafers Re-constituted 200mm, 300mm and >300mm non- std warped wafers Non-std panels Bonded warped wafers on Si or Glass carriers.

February 4, 2015 8-K

Regulation FD Disclosure, Financial Statements and Exhibits

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 4, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commis

February 4, 2015 EX-99.1

LITHOGRAPHY BUSINESS GROUP Richard Rogoff LITHOGRAPHY SYSTEMS GROUP • Headquarters in Wilmington, Massachusetts • More than 400 years of combined lithography experience dating from the 1980s and GCA steppers • Large IP portfolio surrounding Advanced

a7rtec2015analysteventls LITHOGRAPHY BUSINESS GROUP Richard Rogoff LITHOGRAPHY SYSTEMS GROUP • Headquarters in Wilmington, Massachusetts • More than 400 years of combined lithography experience dating from the 1980s and GCA steppers • Large IP portfolio surrounding Advanced Packaging and Display Lithography • Well developed supply chain poised for growth and technology advancement 2 JETSTEP® SYSTE

February 4, 2015 EX-99.1

SOFTWARE BUSINESS Thomas Sonderman DATA ANALYSIS & REVIEW BU QUICK FACTS • #1 in Process Control Market • Broadest product portfolio in the industry • 20 years experience and >20k systems worldwide • Over $200million invested in R&D 2 Source: Gartner

a4rtec2015analysteventda SOFTWARE BUSINESS Thomas Sonderman DATA ANALYSIS & REVIEW BU QUICK FACTS • #1 in Process Control Market • Broadest product portfolio in the industry • 20 years experience and >20k systems worldwide • Over $200million invested in R&D 2 Source: Gartner, April 2014 DEFECT ANALYSIS YIELD ANALYSIS AUTO DEFECT CLASSIFICATION ADV.

February 4, 2015 EX-99.1

© 2013 WESTERN DIGITAL TECHNOLOGIES, INC. ALL RIGHTS RESERVED RTEC Analyst Day A Customer’s Perspective February 4, 2015 Norm Armour, VP of Manufacturing Technology, Western Digital Corp WD CONFIDENTIAL © 2013 WESTERN DIGITAL TECHNOLOGIES, INC. ALL R

a9rtecanalystday2414r1 © 2013 WESTERN DIGITAL TECHNOLOGIES, INC. ALL RIGHTS RESERVED RTEC Analyst Day A Customer’s Perspective February 4, 2015 Norm Armour, VP of Manufacturing Technology, Western Digital Corp WD CONFIDENTIAL © 2013 WESTERN DIGITAL TECHNOLOGIES, INC. ALL RIGHTS RESERVED 2 Forward-Looking Statements SAFE HARBOR This presentation contains forward-looking statements that involve risk

February 2, 2015 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2014 FOURTH QUARTER AND YEAR-END RESULTS

EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2014 FOURTH QUARTER AND YEAR-END RESULTS • Fourth Quarter Revenue and Non-GAAP EPS Significantly Exceeded Guidance; • Full Year Revenue, Gross Margin, and Non-GAAP Net Income and EPS Grew in 2014 FLANDERS, NEW JERSEY (February 2, 2015) - Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment

February 2, 2015 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 2, 2015 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commis

December 11, 2014 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 5, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commis

November 18, 2014 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Costs Associated with Exit or Disposal Activities

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 14, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commi

November 6, 2014 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended September 30, 2014 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 0

November 6, 2014 EX-10.1

Rudolph Technologies, Inc. Employee Restricted Stock Unit Purchase Agreement

Exhibit 10.1 Rudolph Technologies, Inc. Employee Restricted Stock Unit Purchase Agreement THIS AGREEMENT (?Agreement?), dated , 20 (the ?Award Date?), is made between Rudolph Technologies, Inc., a Delaware corporation, hereinafter referred to as the ?Company,? and (the ?Participant?). 1. Definitions. All capitalized terms used in this Agreement without definition shall have the meanings ascribed i

November 3, 2014 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 3, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commis

November 3, 2014 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2014 THIRD QUARTER RESULTS

EX-99.1 2 ex991q32014.htm EXHIBIT EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2014 THIRD QUARTER RESULTS • Revenues and Earnings Exceed Guidance; • Diverse Product Mix Continues to Drive Strong Gross Margins FLANDERS, NEW JERSEY (November 3, 2014) - Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and

September 30, 2014 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 29, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Comm

August 6, 2014 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended June 30, 2014 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 000-27

August 6, 2014 EX-10.3

RESTATED AND AMENDED EMPLOYMENT AGREEMENT

Exhibit 10.3 RESTATED AND AMENDED EMPLOYMENT AGREEMENT This Agreement is entered into by and between August Technology Corporation (?August Technology?), a Minnesota corporation, with its principal place of business at 4900 West 78th Street, Bloomington, Minnesota 55435, and Michael Plisinski of [Address]. (?Employee?). This Agreement has been restated and amended effective as of July 29, 2014. Fo

August 6, 2014 EX-10.1

RUDOLPH TECHNOLOGIES RESTATED AND AMENDED MANAGEMENT AGREEMENT

Exhibit 10.1 RUDOLPH TECHNOLOGIES RESTATED AND AMENDED MANAGEMENT AGREEMENT THIS MANAGEMENT AGREEMENT (the “Agreement”) is made as of July 24, 2000 (the “Effective Date”), as restated and amended through July 29, 2014, by and among Rudolph Technologies (“Technologies” or the “Company”), a Delaware corporation, and Paul F. McLaughlin (“Executive”). WHEREAS, Executive desires to be employed as an Of

August 6, 2014 EX-10.2

RUDOLPH TECHNOLOGIES RESTATED AMD AMENDED MANAGEMENT AGREEMENT

Exhibit 10.2 RUDOLPH TECHNOLOGIES RESTATED AMD AMENDED MANAGEMENT AGREEMENT THIS MANAGEMENT AGREEMENT (the ?Agreement?) is made as of July 24, 2000 (the ?Effective Date?), as restated and amended through July 29, 2014, by and among Rudolph Technologies (?Technologies? or the ?Company?), a Delaware corporation, and Steven R. Roth (?Executive?). WHEREAS, Executive desires to be employed as an Office

August 6, 2014 EX-10.4

RESTATED AND AMENDED EMPLOYMENT AGREEMENT

Exhibit 10.4 RESTATED AND AMENDED EMPLOYMENT AGREEMENT This Agreement is entered into by and between August Technology Corporation (“August Technology”), a Minnesota corporation, with its principal place of business at 4900 West 78th Street, Bloomington, Minnesota 55435, and D. Mayson Brooks of [Address] (“Employee”). This Agreement has been restated and amended effective as of July 29, 2014. For

August 4, 2014 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2014 SECOND QUARTER RESULTS n Record High Software Revenue; n Strong Gross Margins Drive Non GAAP Earnings to High End of Guidance

EX-99.1 2 ex991q22014.htm EXHIBIT EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2014 SECOND QUARTER RESULTS n Record High Software Revenue; n Strong Gross Margins Drive Non GAAP Earnings to High End of Guidance FLANDERS, NEW JERSEY (August 4, 2014) - Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and

August 4, 2014 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec8k2014q2.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 4, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction

June 30, 2014 8-K

Financial Statements and Exhibits, Other Events

8-K 1 a8k6302014.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): June 30, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of

June 30, 2014 EX-99.1

Rudolph Announces Ruling in Litigation with ITC Supreme Court denies Writ of Certiorari

EX-99.1 2 ex99163014.htm EXHIBIT EXHIBIT 99.1 Rudolph Announces Ruling in Litigation with ITC Supreme Court denies Writ of Certiorari Flanders, NJ (June 30, 2014) ─ Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and advanced packaging facilities, today announced a ruling by the U.S. Supreme Court

May 29, 2014 EX-1.01

Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934

EX-1.01 2 a2014exhibit101.htm EXHIBIT 1.01 Exhibit 1.01 Conflict Minerals Report of Rudolph Technologies, Inc. in Accordance with Rule 13p-1 under the Securities Exchange Act of 1934 This is the Conflict Minerals Report of Rudolph Technologies, Inc. (“Rudolph”, the “Company,” “we,” “us,” or “our”) for the year ended December 31, 2013 in accordance with Rule 13p-1 under the Securities Exchange Act

May 29, 2014 SD

- SD

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM SD Specialized Disclosure Report RUDOLPH TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware 000-27965 22-3531208 (State or other jurisdiction of incorporation or organization) (Commission File Number) (I.R.S. Employer Identification Number) One Rudolph Road, PO Box 1000, Flanders, New Jerse

May 21, 2014 8-K

Submission of Matters to a Vote of Security Holders

8-K 1 a8k5212014.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 21, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of i

May 1, 2014 EX-10.3

EX-10.3

Exhibit 10.3

May 1, 2014 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended March 31, 2014 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 000-2

May 1, 2014 EX-10.1

EX-10.1

Exhibit 10.1

April 28, 2014 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): April 28, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commissi

April 28, 2014 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2014 FIRST QUARTER RESULTS

EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2014 FIRST QUARTER RESULTS • Software Revenue Drives Strong Gross Margins; • Cash and Marketable Securities Increase $16 Million in the Quarter FLANDERS, NEW JERSEY (April 28, 2014) - Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and Advanced Packaging fa

April 23, 2014 DEF 14A

- DEF 14A

DEF 14A 1 rtec2014proxydef.htm DEF 14A Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A PROXY STATEMENT PURSUANT TO SECTION 14(a) OF THE SECURITIES EXCHANGE ACT OF 1934 Filed by the Registrant x Filed by a Party other than the Registrant ¨ Check the appropriate box: ¨ Preliminary Proxy Statement ¨ Confidential, for Use of the Commission Only (a

April 11, 2014 8-K

Financial Statements and Exhibits, Other Events - 8-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 31, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commissi

April 11, 2014 EX-99.1

Rudolph Announces Favorable Ruling in Patent Infringement Lawsuit Camtek’s products infringe wafer inspection patent held by Rudolph

EXHIBIT 99.1 Rudolph Announces Favorable Ruling in Patent Infringement Lawsuit Camtek’s products infringe wafer inspection patent held by Rudolph Flanders, NJ (April 9, 2014)─ Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and advanced packaging facilities, today announced another favorable ruling

February 27, 2014 EX-21.1

SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limit

Exhibit 21.1 SUBSIDIARIES Name Jurisdiction Rudolph Technologies Europe, B.V. Netherlands Rudolph Technologies Japan KK Japan Rudolph Technologies (Shanghai) Trading Co., Ltd. China Rudolph Technologies Germany GmbH Germany Azores Corp. Delaware Azores Asia Limited Hong Kong

February 27, 2014 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) x ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Fiscal Year Ended December 31, 2013 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 000-27965

February 14, 2014 SC 13G/A

RTEC / Rudolph Technologies, Inc. / STEELHEAD PARTNERS LLC - RUDOLPH TECHNOLOGIES 13G/A FILED FEBRUARY 14, 2014 Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G* (Rule 13d-102) INFORMATION TO BE INCLUDED IN STATEMENTS FILED PURSUANT TO §240.13d-1(b), (c) AND (d) AND AMENDMENTS THERETO FILED PURSUANT TO §240.13d-2. (Amendment No. 1)* Rudolph Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value per share (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2

February 12, 2014 SC 13G/A

RTEC / Rudolph Technologies, Inc. / VANGUARD GROUP INC Passive Investment

SC 13G/A 1 rudolphtechninc.htm SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 2 )* Name of issuer: Rudolph Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 781270103 Date of Event Which Requires Filing of this Statement: December 31, 2013 Check the appropriate box to designate the rule pursua

February 10, 2014 SC 13G

RTEC / Rudolph Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G Passive Investment

SC 13G 1 rrd486.htm SCHEDULE 13G UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* RUDOLPH TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 781270103 (CUSIP Number) December 31, 2013 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designat

February 5, 2014 SC 13G

RTEC / Rudolph Technologies, Inc. / GAGNON SECURITIES LLC - SCHEDULE 13G Passive Investment

SC 13G 1 rudolph13g.htm SCHEDULE 13G UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* RUDOLPH TECHNOLOGIES, INC. (Name of Issuer) Common Stock, $0.001 par value per share (Title of Class of Securities) 781270103 (CUSIP Number) January 27, 2014 (Date of Event Which Requires Filing of this Statement) Chec

February 3, 2014 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2013 FOURTH QUARTER RESULTS • Earnings Per Share Exceeded Guidance; • Increase in Memory Sales Drove Revenues in the Quarter

EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2013 FOURTH QUARTER RESULTS • Earnings Per Share Exceeded Guidance; • Increase in Memory Sales Drove Revenues in the Quarter FLANDERS, NEW JERSEY (February 3, 2014) - Rudolph Technologies, Inc. (NYSE: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and Advanced Packaging facilities, today a

February 3, 2014 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 3, 2014 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commis

January 2, 2014 8-K

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers - 8-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 31, 2013 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commi

December 13, 2013 25

- 25

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 25 NOTIFICATION OF REMOVAL FROM LISTING AND/OR REGISTRATION UNDER SECTION 12(b) OF THE SECURITIES EXCHANGE ACT OF 1934 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commission File Number) (IRS Employer Identi

December 6, 2013 8-A12B

Form 8-A

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-A CURRENT REPORT FOR REGISTRATION OF CERTAIN CLASSES OF SECURITIES PURSUANT TO SECTION 12(b) OR (g) OF THE SECURITIES EXCHANGE ACT OF 1934 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 22-3531208 (State or other jurisdiction of incorporation) (IRS Employer Identification No.)

December 3, 2013 EX-99.1

RUDOLPH TECHNOLOGIES TO TRANSFER STOCK LISTING TO NYSE

EXHIBIT 99.1 RUDOLPH TECHNOLOGIES TO TRANSFER STOCK LISTING TO NYSE FLANDERS, NEW JERSEY (December 3, 2013) - Rudolph Technologies, Inc. (Nasdaq: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and advanced packaging facilities, announced the pending transfer of the listing of its common stock from the NASDAQ Global Select Market (

December 3, 2013 8-K

Notice of Delisting or Failure to Satisfy a Continued Listing Rule or Standard; Transfer of Listing, Financial Statements and Exhibits

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 3, 2013 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commis

November 6, 2013 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended September 30, 2013 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 0

November 4, 2013 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2013 THIRD QUARTER RESULTS

EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2013 THIRD QUARTER RESULTS • Strong Profit Performance: Non-GAAP Earnings Per Share of $0.06 • Front-End Logic, Foundry and Memory Orders Increase FLANDERS, NEW JERSEY (November 4, 2013) - Rudolph Technologies, Inc. (Nasdaq: RTEC), a leading provider of process characterization equipment, lithography equipment and software for wafer fabs and advanced packa

November 4, 2013 8-K

Regulation FD Disclosure, Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 rtec8k2013q3.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 4, 2013 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdictio

November 4, 2013 EX-99.2

Ruling Issued in Rudolph’s Patent Infringement Case Brought by ITC Judgment reverses at least $23.4 million in damages

EXHIBIT 99.2 Ruling Issued in Rudolph’s Patent Infringement Case Brought by ITC Judgment reverses at least $23.4 million in damages Flanders, New Jersey (November 4, 2013)-Rudolph Technologies, Inc. (NASDAQ: RTEC) announced today that the United States Federal Court of Appeals issued a ruling in Rudolph’s ongoing patent infringement dispute with Integrated Technology Corporation of Tempe, Arizona

August 2, 2013 EX-3.1

Restated Certificate of Incorporation of Registrant, as amended (Conformed Version) (incorporated by reference to Exhibit 3.1 to the Registrant’s Quarterly Report on Form 10-Q (SEC File No. 000-27965) filed on August 2, 2013).

Exhibit 3.1 RESTATED CERTIFICATE OF INCORPORATION OF RUDOLPH TECHNOLOGIES, INC. (Conformed Version - as of May 31, 2013) Rudolph Technologies, Inc., a corporation organized and existing under the laws of the State of Delaware, hereby certifies as follows: A. The name of the corporation is Rudolph Technologies, Inc. The corporation was originally incorporated under the name of Rudolph Holdings Corp

August 2, 2013 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the Quarterly Period Ended June 30, 2013 OR o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File No. 000-27

August 2, 2013 EX-3.2

CERTIFICATE OF AMENDMENT OF RESTATED CERTIFICATE OF INCORPORATION OF RUDOLPH TECHNOLOGIES, INC. Pursuant to Section 242 of the General Corporation Law of the State of Delaware

Exhibit 3.2 CERTIFICATE OF AMENDMENT OF RESTATED CERTIFICATE OF INCORPORATION OF RUDOLPH TECHNOLOGIES, INC. Pursuant to Section 242 of the General Corporation Law of the State of Delaware The undersigned, being a duly appointed officer of Rudolph Technologies, Inc. (the ?Corporation?), a corporation organized and existing under and by virtue of the Delaware General Corporation Law (the ?DGCL?), fo

August 1, 2013 8-K

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 1, 2013 Rudolph Technologies, Inc. (Exact name of registrant as specified in its charter) DELAWARE 000-27965 22-3531208 (State or other jurisdiction of incorporation) (Commissi

August 1, 2013 EX-99.1

RUDOLPH TECHNOLOGIES REPORTS 2013 SECOND QUARTER RESULTS Revenue Increased 11 Percent Sequentially, Fueled by a Balance of Front-End Metrology and Back-End Macro Defect Inspection Business

EX-99.1 2 ex991q22013.htm EXHIBIT EXHIBIT 99.1 RUDOLPH TECHNOLOGIES REPORTS 2013 SECOND QUARTER RESULTS Revenue Increased 11 Percent Sequentially, Fueled by a Balance of Front-End Metrology and Back-End Macro Defect Inspection Business FLANDERS, NEW JERSEY (August 1, 2013) - Rudolph Technologies, Inc. (Nasdaq: RTEC), a leading provider of process characterization equipment, lithography equipment a

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